1.
Rev Sci Instrum
; 92(10): 103301, 2021 Oct 01.
Artigo
em Inglês
| MEDLINE
| ID: mdl-34717413
RESUMO
We report on the development of multi-beam radio frequency (RF) linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 112 beams. The total argon ion current extracted from the 112-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path toward using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in material processing.